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Linear motor performance testing and Measurement system LMPMS-II
This domestically pioneering system measures various physical properties of linear motors. It employs an air-bearing guide rail and a high-performance servo motor traction system, combined with high-precision mechanical sensors and other types of sensors. This allows for automatic and continuous testing and data collection and statistical analysis to verify and evaluate the performance and consistency of linear motors.。
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Precision five-axis linkage motion system P5ALS-AB
P5ALS-AB Series Model P5ALS-200.90.360U200.200.A Product Introduction
The P5ALS-AB series is a new series of 5-axis precision motion systems launched by our company for high-precision 5-axis linkage processing or linkage detection and other high-demand industry applications. The system uses natural granite as the bed, welded integrated frame and air-floating precision vibration isolators, which can well isolate the various vibrations that the equipment is subjected to during use. At the same time, each linear axis uses the motion mechanism of the air-floating guide linear motor, and with the AC axis driven by the high-precision direct drive motor, it can obtain very high spatial positioning accuracy. This system also uses a motion control system that supports the RTCP tool tip following algorithm, which can very well complete some special trajectory calculations and controls. Main features of the P5ALS-AB series The XY axis uses air static pressure guide rails as the guide mechanism, which has very good straightness, flatness and pitch and yaw performance, which is the requirement and basis for high spatial positioning accuracy. All 5-axis systems use absolute value gratings as feedback, which can be used immediately after power-on, eliminating the time required for the incremental encoder of the multi-axis system to return to zero and greatly reducing errors. The Z axis uses a high-performance linear motor motion mechanism, and is equipped with a load-adjustable balance system and a brake mechanism, which greatly improves the reliability and safety of the equipment during movement. The AC axis uses a high-precision direct-drive motor and reducer, which can achieve high-precision motion while ensuring sufficient drive torque and stable accuracy. The AC axis can also be equipped with a higher-precision air-floating turntable or spindle. The default recommendation is to use the ACS motion control system, which supports RTCP tool tip following, five-axis linkage, GCODE and other functions, and has very good control effects and development scalability. BECKHOF
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E-ABRX-M250 High precision Aerostatic Rotary Stage
Surface metrology, including the measurement of roundness, flatness, and form error•Micro- and nanotomography•Beamline and synchrotron research•Precision manufacturing, including diamond turning, grinding and other high-performance machine toolapplications•Optical alignment, inspection and calibration systems•Engineered for Precision•The EABRX series is meticulously engineered to consistently satisfy even the most stringent performancerequirements. At its core is an industry-leading, air-bearing technology that delivers nanometer-level errormotion performance with high stiffness and load-carrying capabilities.1. Realize high-precision 360° continuous rotary displacement adjustment with nanometer/micron level positioning accuracy.
2. Provide ultra-low friction and non-contact rotation via aerostatic bearing, avoiding mechanical wear and backlash.
3. Support stepless speed regulation and precise angular positioning for different test and processing requirements.
4. Achieve stable load bearing under high-speed rotation, with excellent anti-vibration and runout suppression performance.
5. Enable quick zero reset and multi-position preset, realizing automatic and semi-automatic operation matching.
6. Equip with high-precision angle encoder for real-time position feedback and closed-loop control. -
E-ABRTE-M100 Air Bearing rotation stage
Surface metrology, including the measurement of roundness, flatness, and form error•Micro- and nanotomography•Beamline and synchrotron research•Precision manufacturing, including diamond turning, grinding and other high-performance machine toolapplications•Optical alignment, inspection and calibration systems•Engineered for Precision•The EABRX series is meticulously engineered to consistently satisfy even the most stringent performancerequirements. At its core is an industry-leading, air-bearing technology that delivers nanometer-level errormotion performance with high stiffness and load-carrying capabilities. -
EG-DL130 Series of biaxial XY nanostages dual-axis XY positioning Stage which uses dual linear motors to drive the lower axis and a single linear motor to drive the upper axis.
EG-DL130 Series of biaxial XY nanostages
Performance Characteristics
⚫ Integrated dual-axis XY linear motor motion platform
⚫ Driven by linear motors and equipped with high-precision crossed roller guides
⚫ Low side height, minimal Abbe error
⚫ Flatness and straightness throughout the entire stroke less than ±2μm
⚫ Excellent dynamic performance, dynamic following error less than ±30nm at a constant speed of 1mm/s
⚫ Resolution 1nm, bidirectional repeatability ±100nm to ±150nm, positioning accuracy ±250nm to 300nm
⚫ In-situ stability ±4nm (equipped with high-spec gratings and high-performance controllers)
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EG-DL Series XYZ Three-Axis Linear motor Stage
◆ Highly integrated XY linear motor nanoplatform
◆ Nanoscale performance and long stroke
◆ Low motion error and high stability accuracy
◆ Anti-creep characteristics
◆ High dynamic performance of direct drive technology
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Non-contact air bearing 360° continuous high-speed direct drive EG-ZAR Series a high-performance air-bearing direct-drive rotary table ，
Performance Characteristics
⚫ Non-contact air bearing, 360° continuous high-speed direct-drive rotary table
⚫ Direct-drive control by rotary motor
⚫ Angular accuracy ±2 arc sec, repeatability ±1 arc sec
⚫ Axial and radial runout less than 300nm
⚫ High-precision circular grating position feedback
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Autofocus function Triaxial spiral scanning system EG-DL240-400-Z5-T
Performance Features
⚫ 3-axis helical scanning system, capable of Archimedes constant velocity helical scanning, supporting autofocus, Part-Speed PSO equal-interval trigger camera capture function for constant velocity helical synthesized trajectories.
⚫ High-speed air bearing, low runout.
⚫ T-axis with a 12-inch 4kg chuck disk and built-in air slip ring, supporting up to 6000rpm. Therefore, when the trajectory radius is reduced from 150mm to 10mm, the platform’s synthesized linear velocity can still remain constant at 2000mm/s.
⚫ X-axis and Z-axis are driven by linear motors, equipped with high-precision crossed roller guides, and the Z-axis uses cylinder counterweight; the T-axis is directly driven by a rotary motor.
⚫ X-axis flatness and straightness ±2μm, Z-axis straightness ±2μm.
⚫ X-axis and Z-axis absolute positioning accuracy ±200nm; T-axis resolution 0.1 arc. Repeatability: ±0.5 arc sec; Positioning accuracy: ±1 arc sec
Strong load-bearing capacity: Maximum axial load on the T-axis is 10 kg, and the maximum radial load is 2 kg.
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EG-DL Series Z-Axis Linear motor Stage
◆ Highly integrated XY linear motor nanoplatform
◆ Nanoscale performance and long stroke
◆ Low motion error and high stability accuracy
◆ Anti-creep characteristics
◆ High dynamic performance of direct drive technology
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Two-axis integrated linear motor positioning stage EG-DPL-XY SERIES
EG-DPL-XY SERIES Twp axis XY Linear motor stages
Performance Characteristics
⚫ Integrated Dual-Axis XY Linear Motor Motion Platform
⚫ Dual-motor drive for upper and lower axes, equipped with high-precision crossed roller guides
⚫ Low side height, minimal Abbe error
⚫ Flatness and straightness throughout the entire stroke less than ±2µm
⚫ Excellent dynamic performance, position error less than ±20nm at a constant speed of 1mm/s
⚫ Resolution 1nm, repeatability ±100nm to ±150nm, positioning accuracy ±200nm to ±400nm
⚫ In-situ stability ±3nm (equipped with high-spec grating and high-performance controller)
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EG-DPLA SERIES dual-axis XY positioning hollow Stage uses dual linear motors to drive the lower axis and a single linear motor to drive the upper axis.
EG-DPLA SERIES dual-axis XY positioning hollow Stage
Performance Characteristics
⚫ Dual-axis integrated hollow linear positioning platform
⚫ The lower axis is driven by dual linear motors, and the upper axis is driven by a single linear motor, equipped with high-precision cross roller guides.
⚫ Low side height, minimal Abbe error
⚫ Flatness and straightness less than ±1.75μm
⚫ Resolution 1nm, repeatability ±150nm, positioning accuracy ±300nm
⚫ Strong load-bearing capacity, maximum horizontal load 25kg
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E-LMT-XY (High precisionLinear Motor Stage) XY Linear motor motion Stage
● Travel range 100 mm × 100 mm or 200 mm × 200 mm
● Unidirectional repeatability to 0.3 µm
● Ironless 3-phase linear motor
● Velocity to 500 mm/s Incremental
● linear encoder with 4.88 nm resolution
● Crossed roller guides
● Linear motors
